TUĞAY, E. Et Al. 2013. Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method. 9th Nanoscience and Nanotechnology Conference (NanoTR-9) , (Erzurum, Turkey), 111.

TUĞAY, E., Aydınlı, A., & TURAN, R., (2013). Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method . 9th Nanoscience and Nanotechnology Conference (NanoTR-9) (pp.111). Erzurum, Turkey

TUĞAY, EVRİN, Atilla Aydınlı, And RAŞİT TURAN. "Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method," 9th Nanoscience and Nanotechnology Conference (NanoTR-9), Erzurum, Turkey, 2013

TUĞAY, EVRİN Et Al. "Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method." 9th Nanoscience and Nanotechnology Conference (NanoTR-9) , Erzurum, Turkey, pp.111, 2013

TUĞAY, E. Aydınlı, A. And TURAN, R. (2013) . "Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method." 9th Nanoscience and Nanotechnology Conference (NanoTR-9) , Erzurum, Turkey, p.111.

@conferencepaper{conferencepaper, author={EVRİN TUĞAY Et Al. }, title={Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method}, congress name={9th Nanoscience and Nanotechnology Conference (NanoTR-9)}, city={Erzurum}, country={Turkey}, year={2013}, pages={111} }