In this study, the effect of ZnCl2 and CdCl2 treatments on the structural, optical and electrical properties of ZnS and CdS thin films grown by chemical bath deposition method was examined. Employing CdCl2 or ZnCl2 treatment to CdS caused a change from cubic to hexagonal structure. After treating ZnS with CdCl2, ZnS phase disappeared and a highly crystalline hexagonal CdS phase formed. CdCl2 treatment on CdS showed an improving effect on surface morphology, but ZnCl2 led to an unfavorable effect. CdCl2 treatment to ZnS was transformed it into a fused structure in which individual grains were disappeared. Treatment of ZnCl2 to ZnS and CdCl2 to CdS induced a slight increase in the amount of Zn and Cd, respectively. However, processing of CdCl2 to ZnS (or ZnCl2 to CdS) resulted in significant quantity of Cd (or Zn) elements in the samples. The transmittance of CdS decreased with CdCl2 and ZnCl2 treatments. However, the highest transmittance in ZnS thin films was achieved after ZnCl2 treatment. According to PL spectra, different emission types increased partially in CdS/CdCl2, but decreased in CdS/ZnCl2. After applying ZnCl2 treatment to ZnS, the emission type appears similar to the as deposited sample, while CdCl2 treatment caused the emission type to change. Electrical measurements showed that the resistivity and carrier concentrations of the samples were in the order of 10(3) Omega cm and 10(13) cm(-3), respectively. The carrier concentrations of the CdS/ZnCl2 and ZnS/CdCl2 sample increased slightly compared the as deposited samples.