Material Adhesion Properties of Ruthenium Phosphides from First Principles


Qin S., Sensoy M. G., De Boer M. P., Carpick R. W., Rappe A. M.

JOURNAL OF PHYSICAL CHEMISTRY C, 2026 (SCI-Expanded, Scopus)

  • Yayın Türü: Makale / Tam Makale
  • Basım Tarihi: 2026
  • Doi Numarası: 10.1021/acs.jpcc.6c04815
  • Dergi Adı: JOURNAL OF PHYSICAL CHEMISTRY C
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Chemical Abstracts Core, Chimica, Compendex, MEDLINE
  • Recep Tayyip Erdoğan Üniversitesi Adresli: Evet

Özet

First-principles density functional theory (DFT) calculations are performed to investigate adhesion during a full contact cycle of conductive ruthenium phosphide surfaces (RuP and Ru2P). A range of work of adhesion is obtained, considering various lateral alignments of crystal grains constructed through translations and rotations. Surface reconstruction and oxidation are considered to simulate the micro- and nanoelectromechanical systems (MEMS/NEMS) operating environment. Our results indicate that ruthenium phosphides have work of adhesion lower than those of pure Ru self-mated metal contacts. The onset of chemical bond formation during the switch-closing process leads to anharmonic interaction energy curves deviating from the universal binding-energy relation. Step-by-step switch opening calculations provide additional insight into surface stability against chemical bond formation; in particular, the RuP surface shows no strong bonding across the interface. Surface reconstruction and oxidation lower the work of adhesion for RuP and Ru2P from as high as 3.85 J/m2 and 2.03 J/m2 to as low as 0.08 J/m2 and 0.03 J/m2, respectively, lowering the probability of material transfer, contact damage, or device failure due to surfaces remaining stuck closed. This work provides a systematic investigation of the adhesion properties of Ru, RuO2, RuP, and Ru2P, indicating the potential of ruthenium phosphides as stable conductive contacts for novel MEMS/NEMS switches.