Laser-Assisted and Additively Manufactured Multilayer Metal-Insulator-Metal Capacitors

Firat Ö. F., Wang J., Weller T.

IEEE 22nd Annual Wireless and Microwave Technology Conference (WAMICON), Florida, Amerika Birleşik Devletleri, 27 - 28 Nisan 2022, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/wamicon53991.2022.9786110
  • Basıldığı Şehir: Florida
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Recep Tayyip Erdoğan Üniversitesi Adresli: Hayır

Özet

This paper presents a new fabrication technique for a new type of multi-layered metal insulator metal (MIM) capacitors using a high-k dielectric paste. Micro-dispensing is used to realize a 3D printed five-layer MIM capacitor on a Kapton tape. A femtosecond laser is applied for via definition and connections of alternating conductive layers. Dupont CB028 and Creative Materials 128-49 are used to form conductive and dielectric layers, respectively. Measured and simulated data show an effective capacitance of 36 pF, self-resonance frequency of 2.9 GHz, and Q factor of 12 for a 0.85 mm(2) five-layer MIM capacitor.