RF sputtered TiO2 thin films with various deposition conditions for triboelectric friction layer

Durak Yüzüak G., Özkan S., Yüzüak E.

5th INTERNATIONAL ANATOLIAN ENERGY SYMPOSIUM, Trabzon, Turkey, 24 - 26 March 2021, pp.46

  • Publication Type: Conference Paper / Summary Text
  • City: Trabzon
  • Country: Turkey
  • Page Numbers: pp.46




During the last decade, with the incredible presence of electronic devices in our daily lives, alternative solutions to unravel the energy requirement have begun to be assembled. Triboelectric nanogenerators (TENGs) emerge to transform energy from the existing conditions into the electricity as an exceptional energy harvesting technology. TENGs maintains several advantages such as cost-smart, energy-saving and adaptability with material choices, originated in the coupling of working mechanisms between triboelectrification and electrostatic induction.


Instead of using unpractical polymers for long-term usage in tough conditions as a friction layer in TENGs, using durable TiO2 thin films are one of the suitable choices through semiconductor materials. With good chemical and mechanical stability, TiO2 films are the most widely used oxide for electronic applications owing to low cost and high activity. Especially, the low-temperature phase - anatase exhibits different surface charge density properties with varying surface modifications to affect TENGs performance.


TiO2 films deposited on Si(100) substrate by using the RF magnetron sputtering method with various working powers and partial O2 pressures. To manage the triboelectric performance of the TiO2 films, structural and electrical characterizations accomplished with X-ray diffraction, scanning electron microscopy, semi-logarithmic current-voltage and frequency-dependent capacitance measurements.  The variations on the working power and partial O2 pressures affect the crystal and surface structure under the influence of sputtering conditions caused by development in the particle distributions. The surface charge density characteristics were received by the influence of the variation in the working power and partial O2 pressures concerned from the frequency-dependent capacitance measurements. The maximum capacitance value at very low frequencies regarded as a further contribution for the triboelectric, which is quite close to the natural oscillation frequency due to the coupling of triboelectrification and electrostatic induction.



This work was supported by the Scientific and Technological Research Council of Turkey (TÜBİTAK) under the grant number of 119M972.



Keywords: Triboelectric Effect, TiO2, Triboelectric Nanogenerator, Friction Layer