Influence of deposition parameteres on the structural and optical properties of the SiNx films prepared by PECVD method


TUĞAY E. , Aydınlı A., TURAN R.

9th Nanoscience and Nanotechnology Conference (NanoTR-9), Erzurum, Turkey, 24 - 28 June 2013, pp.111

  • Publication Type: Conference Paper / Summary Text
  • City: Erzurum
  • Country: Turkey
  • Page Numbers: pp.111